| 产品特性：质量流量 | 品牌：Sensirion盛思锐 | 型号：SFC3100 |
| 传感器类型：质量流量控制器 | 监测范围：50sccm~100slm | 精度：0.8% |
| 输出电压：10V | 电源电压：5V | 系列：SFC3100 |
| 特性：SFC3100 | 安装类型：SFC3100 | 最小包装数：SFC3100 |
| 应用领域：测量仪器 |
SFC3100热式微传感器MEMS质量流量控制器Sensirion盛思锐
气体质量流量控制器
Senisirion是您的可靠合作伙伴，凭借我们前瞻式及以顾客为中心的供应链管理，交付周期得以保障。
多功能SFC5400适用于工业和医疗相关应用，多种配置满足您的确切需求。
SFC5500 系列现提供配有多气体校准的质量流量控制器。
Sensirion气体质量流量控制器在宽动态范围快速而***控制气体流量。得益于创新的Sensirion?技术，质量流量控制器的核心是热式微传感器（MEMS），芯片上集成了完整的信号处理电路。流量测量采用热式原理，高效控制由模拟控制电路实现。这种独特的集成技术以有吸引力的成本实现***的性能和可靠性。
Sensirion 氣體質量流量控制器概覽
| SFC5400 | SFM5400 | SFC5300 | SFM5300 | |||
|---|---|---|---|---|---|---|
| Flow range | 50, 100, 200, 500 sccm; 1, 2,5,10 slm | 20, 50, 100 slm | 50, 100, 200, 500 sccm; 1, 2,5,10 slm | 20, 50, 100 slm | 50, 100, 200, 500 sccm; 1, 2,5 slm | |
| Repeatability, % of reading | 0.1% s.p. | 0.2% s.p. | 0.1% s.p. | 0.2% s.p. | 0.2% s.p. | |
| Repeatability, % of full scale | 0.01% FS | 0.02% FS | 0.01% FS | 0.02% FS | 0.02% FS | |
| Accuracy, % of reading | 0.8% s.p. | 1% s.p. | 0.8% s.p. | 1% s.p. | 2% s.p. | |
| Accuracy, % of full scale | 0.08% FS | 0.1% FS | 0.08% FS | 0.1% FS | 0.2% FS | |
| External leak rate | 9 x 10-9 mbar l/s (He) | 10 x 10-6 mbar l/s (He) | 9 x 10-9 mbar l/s (He) | 10 x 10-6 mbar l/s (He) | 1 x 10-6 mbar l/s (He) | |
| Leak rate through closed valve | 1 x 10-6 mbar l/s (He) | 1 x 10-6 mbar l/s (He) | not applicable for SFM | not applicable for SFM | 1 x 10-6 mbar l/s (He) | not applicable for SFM flow meter version |
| Pressure drop at max full scale | <2 bar | <3 bar | <0.1 bar | <1 bar | <2 bar | <0.1 bar |
| Settling time for OEM | 50 ms | not applicable for SFM flow meter version | 50 ms | not applicable for SFM flow meter version | ||
| Settling time, typical | 100 ms | not applicable for SFM flow meter version | 100 ms | not applicable for SFM flow meter version | ||
| Control range | 1000:1 (digital interface) | not applicable for SFM flow meter version | 1000:1 | not applicable for SFM flow meter version | ||
| Communication interface | digital(RS485, IO-Link, DeviceNet) and analog (0 to 5 VDC, 0 tp 10 VDC or 4 to 20 mA) | digital (RS485 & IO-Link) | ||||
| Real gas calibration | Air/N2, H2, O2, He, Ar, CO2 | |||||
| Gas conversion | SF6, CF4, C4F8, NH3, N2O, CO, CH4, CH3F, Xe, Ne, Kr, and other gases on request | |||||
| Nominal power supply | 14.0 to 26.0 VDC | |||||
| Electric connector | D-Sub, 9 Pin | |||||
| Mounting, gas connector | Downmount, Swagelok, VCR, VCO, Legris, UNF Thread | Downmount | ||||
| Max working pressure | 10 bar | |||||
| Operation temperature | 0 to 50 °C/32 to 122 °F | |||||
| Gas type switchable by software | on request | |||||
